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2007
921
20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS
1
"Nanopillars and arrays of nanoholes fabricated by extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Patel, D. (...)Rocca, J.J. 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS:486-487