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2007
921
Conference on Lasers and Electro-Optics, CLEO 2007
1
"Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Conference on Lasers and Electro-Optics, CLEO 2007