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2007
921
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
1
"Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25(6):2094-2097