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Abstract:

Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact tabletop set up. © 2007 Optical Society of America.

Registro:

Documento: Artículo
Título:Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
Autor:Wachulak, P.W.; Capeluto, M.G.; Marconi, M.C.; Menoni, C.S.; Rocca, J.J.
Filiación:NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University, United States
Departamento de Física, Facuhad de Ciencias Exactas, Universidad de Buenos Aires, Argentina
Palabras clave:Array processing; Interferometers; Lithography; Nanoscale patterns; Tabletop set up; Nanostructured materials
Año:2007
Volumen:15
Número:6
Página de inicio:3465
Página de fin:3469
DOI: http://dx.doi.org/10.1364/OE.15.003465
Título revista:Optics Express
Título revista abreviado:Opt. Express
ISSN:10944087
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v15_n6_p3465_Wachulak

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Citas:

---------- APA ----------
Wachulak, P.W., Capeluto, M.G., Marconi, M.C., Menoni, C.S. & Rocca, J.J. (2007) . Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography. Optics Express, 15(6), 3465-3469.
http://dx.doi.org/10.1364/OE.15.003465
---------- CHICAGO ----------
Wachulak, P.W., Capeluto, M.G., Marconi, M.C., Menoni, C.S., Rocca, J.J. "Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography" . Optics Express 15, no. 6 (2007) : 3465-3469.
http://dx.doi.org/10.1364/OE.15.003465
---------- MLA ----------
Wachulak, P.W., Capeluto, M.G., Marconi, M.C., Menoni, C.S., Rocca, J.J. "Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography" . Optics Express, vol. 15, no. 6, 2007, pp. 3465-3469.
http://dx.doi.org/10.1364/OE.15.003465
---------- VANCOUVER ----------
Wachulak, P.W., Capeluto, M.G., Marconi, M.C., Menoni, C.S., Rocca, J.J. Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography. Opt. Express. 2007;15(6):3465-3469.
http://dx.doi.org/10.1364/OE.15.003465